During development, a positive tone resist film is structured by a removal of exposed areas, while unexposed areas are removed if negative resists are used. To achieve reproducible results, temperatures between 21 and 23 °C 0.5 °C are highly recommended.
You will get efficient and thoughtful service from Boyang.
Allresist offers two different kinds of developers which are either buffered systems (AR 300-26, AR 300-35) or metal ion free (unbuffered) TMAH developers (AR 300-44 … 475):
Developer AR 300-26 is a buffered system with high activity which is preferably used for the development of thick resist films > 5 µm, if high contrast, steep edges, and short development times are desired. Provided as developer concentrate, this developer is diluted with deionised water and can also be used for spray developments.
Developer AR 300-35 is a buffer system with broad process range and particularly characterised by a wide variation range with respect to contrast and sensitivity. This highly versatile developer suitable for most photoresists is provided as developer concentrate which can be diluted with deionised water. The undiluted developer solution is primarily designed for the development of 3 – 6 µm resist films. This developer is suitable for aluminium-containing surfaces, since it does (in contrast to other developers) not attack aluminium.
The developer product line AR 300-40 comprises four metal ion-free developers of various concentrations, which particularly well meet the high demands of micro lithographic applications in semiconductor industry. The use of these developers minimises the possibility of metal ion contamination on the substrate surface. They exhibit excellent netting features and work, as aqueous alkaline solutions, without leaving any residues. The developers are each adjusted to the different resist systems AR-P - and .
Metal ion-free developers are more sensitive to dilution variations than buffer systems. These developers should be diluted very carefully, if possible with scales and immediately prior to use, in order to assure reproducible results.
Higher developer concentrations result in an increased light sensitivity of positive resist developer systems. The required exposure energy is minimised and development time is reduced, allowing a high operational capacity. Possible disadvantages might be a higher dark erosion of unexposed areas and also a low process stability (reaction too fast). Using higher developer concentrations, negative resists require a higher exposure dose for cross-linking.
Lower developer concentrations provide a higher contrast, e.g. of positive resist films, and reduce the resist thickness loss of unexposed or partly exposed border areas even at longer development times. The best contrast values can be obtained with carefully diluted buffered systems (AR 300-26, AR 300-35). In this case, the exposure energy required is mandatorily increased. Negative resists require a lower exposure dose (for cross-linking) at lower developer concentrations. However, the time for complete development is extended. As a rule of thumb for the developer strength: high speed (strong) or high contrast (weak).
The service life of the developing bath for immersion development is limited by factors such as process throughput and CO2 absorption from air. The throughput is dependent on the fraction of exposed areas. CO2 absorption is also caused by frequent opening of the developer bottle and leads to a reduced development rate.
Different methods exist for the development:
Immersion development: The wafer is completely immersed in a bath and move.
Puddle development: A defined amount of the developer is placed on the wafer, the wafer is then gently turned back and forth.
Spray development: The developer is sprayed through nozzles onto the rotating wafer. This development is significantly faster than other methods.
No interruptions should occur during aqueous alkaline development. If wafers are rinsed with water after development and the development is then continued, development rates will increase significantly.
What are the criteria used to select award recipients?
A panel of merit reviewers assessed and scored applications based on the criteria outlined in Section E.1 of the TMaH Model Notice of Funding Opportunity (NOFO). Applicants were encouraged to pay particular attention to TMaH Model NOFO Sections A.4 Program Requirements and D. Application and Submission Information. The merit reviewers assessed and scored applications using a scale of 100 total base points.
The Project Narrative was worth 80 points. In the Project Narrative, applicants addressed their state’s maternal health policy priorities, organization, administration and capacity, payment environment, intended regional plan, status of model pillars, sustainability plan, and stakeholder recruitment plans. The Budget Narrative was worth 20 points. In the Budget Narrative, applicants provided a detailed budget with justification. All elements of the Project Narrative and Budget Narrative were used to assess an applicant’s ability to design and implement an intervention that aims to improve maternal health outcomes.
Can funds distributed to the state Medicaid agencies through the TMaH Model be used to pay current staff or hire staff to carry out work for the model?
Yes, state Medicaid agencies may use model funds to hire personnel to support model implementation. As part of the application process, applicants will be required to submit a detailed budget that explains how the position will support the implementation of the model. Budgets are subject to CMS review and approval.
If the staff person has duties unrelated to the TMaH Model, the state Medicaid agency must ensure the staff person properly accounts for his or her time and effort for separate tasks: implementation (model activity) and other duties as assigned (non-model activity). The state Medicaid agency must take care to avoid using TMaH Model Cooperative Agreement funding for non-model duties. The state Medicaid agency may not use TMaH Model Cooperative Agreement funds to cover the portion of a staff person’s time spent fulfilling other duties as an employee of a state Medicaid agency nor may the state Medicaid agency receive Medicaid reimbursement for the portion of time the staff member is working on model activities and is being reimbursed through Cooperative Agreement funds.
How can Cooperative Agreement funding be used?
State Medicaid agencies selected to participate in the TMaH Model will receive up to $17 million in Cooperative Agreement funding over 10 years.
Specific parameters around how these funds can be used are included in the Notice of Funding Opportunity (NOFO). Generally, funding is intended to support model planning and implementation activities, including but not limited to:
May state Medicaid agencies disburse a portion of their cooperative agreement funding to managed care plans (MCP) to support MCP-level infrastructure and capacity building for the TMaH Model?
Yes, state Medicaid agencies (SMAs) may disburse a portion of their Cooperative Agreement funding to MCPs to support infrastructure and capacity building for the TMaH Model, subject to CMS approval. SMAs should provide a description and details on how they propose to use Cooperative Agreement funding in their budget narrative.
What doula care services will be covered in the TMaH Model?
Doula Services are emotional, physical, and informational support provided by a nonclinical trained professional during pregnancy, delivery, and after childbirth. Doula services established under the TMaH Model must include, but are not limited, to the following:
For more information, please visit TMAH Developer.
Prenatal
What information is required for the application when seeking to implement the model statewide? Could you provide details on the proposed out-of-state comparison states in the Regional Plan section of the application?
For statewide implementation, details are only needed for the applicant state, not for the comparison states. For more information on the Regional Plan, refer to TMaH Model Notice of Funding Opportunity Section D.3.1.4.
State Medicaid agencies choosing statewide implementation should propose at least three other states that they believe are comparable in demographic composition, resource availability, population size and density, birth outcomes, and Medicaid policy. Statewide applicants only need to list three states they believe are similar. State Medicaid agencies do not need to provide details of the proposed comparison states. Statewide applicants should suggest these three comparison states based on familiarity with similarly situated peer states and publicly accessible sources. Additionally, statewide applicants need not know if the proposed comparison states are participating in models.
The TMaH Model Notice of Funding Opportunity (NOFO) states that the test region may be non-contiguous. May a state Medicaid agency choose multiple test regions whose populations differ on demography, rurality, or resource availability, if we identify a comparator region for each?
No. The TMaH Model NOFO requires that the state choose a test region and a comparison region. It is expected that the test region, whether geographically contiguous or non-contiguous, comprises a population that is largely or overall similar in demographics, population density, and health resources. A test area, whether geographically contiguous or non-contiguous, that includes vastly different population characteristics should not be considered one region.
For either statewide or sub-state implementation plans, the comparison region must be similar to the test region across demographic composition, resource availability, and population size and density, and may be geographically contiguous or non-contiguous.
The TMaH Model Notice of Funding Opportunity Section D. 3.1.4 requests information on “FWHCs providing prenatal care” but does it mean FQHCs?
Yes, FWHC is a typo and the correct acronym in that section is FQHC. Applications should provide information on Federally Qualified Health Centers (FQHCs), as requested in that section.
Do state Medicaid agencies need to provide the information requested under TMaH Notice of Funding Opportunity Section D.3.1.(4) for both the test region and the comparison region?
For Section D.3.1(4)(e)(i), the number of Medicaid/CHIP births for women aged 15-45 years is required for the test region and the comparison region, if a sub-state comparison region is being proposed (to make sure both meet the 1,000 birth/year minimum).
For Section D.3.1(4)(e)(ii), the information about health care providers contracted to care for Medicaid and CHIP beneficiaries is required only for the test region in a sub-state implementation. This information is required statewide for statewide implementation.
May a state Medicaid agency have different intervention and control birthing facilities within the test region?
No. Intervention and comparison populations should live in separate ZIP codes or counties and should not be expected to have meaningful service overlap, including services outside of the hospitals or birth centers in the area. The regions may be close together (e.g., both within a large metropolitan area) as long as the populations are separated enough that patients will primarily use clinical and other services only within their designated area.
How will CMS determine the amount of the Provider Infrastructure Payments?
CMS will provide technical assistance to states on the methodology for determining the Provider Infrastructure Payment amount and necessary supporting data analyses. The amount requested by states specifically for Provider Infrastructure Payments will be based on the number of participating Partner Providers and Partner Care Delivery Locations in the test region and the estimated average risk-adjusted per member per month amount, using historic data as a baseline.
Funding for Provider Infrastructure Payments will be available at the beginning of the model year to state Medicaid agencies with approved budgets who have qualified for non-competing continuation Cooperative Agreement funding. State Medicaid agencies must execute a legal agreement (subaward) with a subrecipient(s) for the purpose of administering Provider Infrastructure Payments Such subrecipients may include a managed-care entity, foundations, or another entity dispersing payments to providers and Partner Care Delivery Locations. For more information on Provider Infrastructure Payments, refer to TMaH Model Notice of Funding Opportunity Section A.4.3.1.
May applicants propose to include only community birth settings (birth centers and home birth) in the TMaH Model care delivery and payment model?
No. The TMaH Model is designed to test interventions in both hospital and birth center settings. State Medicaid agencies must advance each required model element and achieve the Pre-Implementation Milestones listed in TMaH Model Notice of Funding Opportunity Table 3 by the end of model year 3, including those that apply exclusively to hospitals.
Please also note that CMS requires that in the test region the average number of combined annual Medicaid- and CHIP-covered births between calendar years - must be no less than 1,000. This requirement is based on an assumption that the majority of Medicaid-covered births in the test region will be attributed to the model. Therefore, applicants should consider the number and size of Partner Providers and Partner Care Delivery Locations participating in the model. Also important to note is the requirement that all managed-care organizations operating in the test region are required Partner Organizations.
Will state Medicaid agencies have to recognize Doulas as a provider billing type?
No, state Medicaid agencies are not required to recognize a new provider type. However, state Medicaid agencies are required to establish coverage and payment for Medicaid and CHIP benefits that are required under the TMaH Model, such as Doula Services. CMS will offer technical assistance regarding how to cover and pay for these services, even if the state does not recognize doulas as a provider type, at sufficient scale to successfully implement the model’s team-based approach. For a list of Doula Services, please refer to the TMaH Model Notice of Funding Opportunity Appendix VII.
May a state Medicaid agency cover Doula Services through value added benefits?
Value-added benefits are extra benefits that managed care plans offer beyond the services covered by Medicaid. State Medicaid agencies will be expected to cover all Doula Services using their Medicaid authority such as through a State Plan Amendment (SPA) or a waiver. State Medicaid agencies should describe any potential obstacles to adding Doula Services as a new Medicaid benefit, such as legislative calendars or staff capacity and corresponding mitigation strategies in their application. Such mitigation strategies could include temporary coverage of doula services as a value-added benefit within the test region, if such temporary coverage is part of a plan leading to a permanent SPA. State Medicaid agencies must have submitted, or have a timeline and process in place, for submitting and implementing a SPA/waiver to cover Doula Services, if not already covered, by the end of the Pre-Implementation Period. As a reminder, CMS will provide technical assistance during the Pre-Implementation Period to help state Medicaid agencies meet milestones.
Do the Quality and Cost Incentive Payments need to be administered through a subrecipient?
No. A state Medicaid agency may decide how to disburse the Quality and Cost Incentive Performance Payments to Partner Providers and Partner Care Delivery Locations. As a reminder, in Model Year 4, Partner Providers and Partner Care Delivery Locations will become eligible for upside-only performance payments to be paid by the state Medicaid agency using the appropriate Medicaid authority and following CMS review.
< Return to TMaH Model web page
For more Solar Cell Productioninformation, please contact us. We will provide professional answers.